Template-Assisted Electrosynthesis of Thick Stoichiometric Thermoelectric Bi2Se3 Micropillars

A method is presented that enables the template assisted electrochemical deposition of tens micrometer thick, compact and stoichiometric Bi2Se3 micropillars. This achieved by modifying acidic electrolyte contains 1 M HNO3 with potassium chloride salt introducing resting pulses during plating process. We demonstrate successful into photoresist templates mold diameters down to 30 µm thicknesses up 45 µm. Cross-sectional EDX line measurements confirm an optimal stoichiometry Bi:Se 40:60 along growth direction, independent micropillar diameter. XRD Raman after point a primarily orthorhombic structure. To illustrate potential this for thermoelectric applications, Seebeck coefficient electrical conductivity thick pillars 50 diameter are measured five different electrodeposition runs. An average 8.6 S/m (SD = 4.5 S/m) high negative -162 µV/K 32 µV/K) was determined. The process here highly promising reliable synthesis micropillars, which can be integrated in micro generators or sensors.